Characterization of small size microlenses by high resolution interference immersion microscopy

Scharf, ToralfKim, M.-S.Herzig, Hans Peter2010-01-222010-01-222010-01-222009https://infoscience.epfl.ch/handle/20.500.14299/45953Characterization of small size microlenses by high resolution interference immersion microscopytext::conference output::conference presentation