Brugger, J.Savu, V.Sidler, K.van den Boogaart, M.A.F.Vazquez-Mena, O.Villanueva, G.2008-02-192008-02-192007https://infoscience.epfl.ch/handle/20.500.14299/18809Quick & Clean: Advances in High Resolution Stencil Lithographytext::journal::journal article::review article