Moosburger, J.Kamp, M.Forchel, A.Ferrini, R.Leuenberger, D.Houdré, R.Anand, S.Berggren, J.2007-08-312007-08-312007-08-31200210.1088/0957-4484/13/3/320https://infoscience.epfl.ch/handle/20.500.14299/11457WOS:000176549200021614Nanofabrication of high quality photonic crystals for integrated optics circuitstext::journal::journal article::research article