Llobera, A.Villanueva, G.Cadarso, V. J.Seidemann, V.Buttgenbach, S.Plaza, J. A.2013-08-062013-08-062013-08-06200710.1109/SENSOR.2007.4300321https://infoscience.epfl.ch/handle/20.500.14299/93832Polymer microoptoelectromechanical systems: Variable optical attenuators and accelerometerstext::conference output::conference proceedings::conference paper