Berdondini, L.Kalbac, M.Gautsch, S.Gullo, M.Staufer, U.Koudelka-Hep, M.de Rooij, N. F.2009-05-122009-05-122009-05-12200310.1117/12.488975https://infoscience.epfl.ch/handle/20.500.14299/38999Fabrication of Nano Interdigitated Electrodestext::conference output::conference proceedings::conference paper