Waldis, S.Zamkotsian, F.Ayyalasomayajula, P.Noell, W.de Rooij, N. F.2009-05-122009-05-122009-05-12200710.1109/OMEMS.2007.4373853https://infoscience.epfl.ch/handle/20.500.14299/40011Micromirrors for Multiobject Spectroscopy: Large Array Actuation and Cryogenic Compatibilitytext::conference output::conference proceedings::conference paper