Ehbets, P.Herzig, H. P.Blattner, P.Nussbaum, P.Clube, F. S. M.Gray, S.Tisserand, J. C.2009-04-222009-04-222009-04-221994https://infoscience.epfl.ch/handle/20.500.14299/37619Interferometric and TIR holographic fabrication of high carrier-frequency surface-relief elementstext::conference output::conference proceedings::conference paper