Spettel, JasminAndrianov, NikolaiDubois, FlorianFurci, HernanAzeem, Munir SyedCassese, TommasoMoridi, MohssenVillanueva, GuillermoQuack, NielsDao, Thang Duy2025-01-262025-01-262025-01-25202410.1109/OMN61224.2024.106852322-s2.0-85206196641https://infoscience.epfl.ch/handle/20.500.14299/245125This study explores the utilization of sputtered aluminum nitride (AlN) thin film on insulator as a platform for integrated photonic MEMS. We experimentally demonstrate proof-of-concept photonic ring resonators with Q-factors up to 31000 at a resonance wavelength of 1.5795 μm.falsealuminum nitrideintegrated photonics MEMSphotonic integrated circuitthin film on insulatorOptical Ring Resonators in Sputtered Aluminum Nitride on Insulator for Integrated Photonic MEMStext::conference output::conference proceedings::conference paper