Feitknecht, L.Freitas, F.Bucher, C.Strahm, B.Howling, A.A.Sansonnens, L.Hollenstein, Ch.2008-05-132008-05-132008-05-132006https://infoscience.epfl.ch/handle/20.500.14299/25300Fast growth of microcrystalline silicon solar cells on LP-CVD ZnO in industrial KAI PECVD reactorstext::conference output::conference paper not in proceedings