Baettig, R.Anthamatten, O.Roulet, J.-C.Fitzpatrick, M.Valk, B.Vogel, P.Marxer, C.Grétillat, M.-A.de Rooij, N. F.2009-05-122009-05-122009-05-121996https://infoscience.epfl.ch/handle/20.500.14299/38977Design Considerations and Optical Characterization of a Silicon-Micromechanical Light Modulator for Telecommunication Aplicationstext::conference output::conference proceedings::conference paper