Indermühle, P.-F.Jaecklin, V. P.Brugger, JLinder, Cde Rooij, N FBinggeli, M.2005-11-022005-11-022005-11-02199510.1016/0924-4247(94)00962-Hhttps://infoscience.epfl.ch/handle/20.500.14299/218594We have fabricated an xy-microstage with integrated protruding tip and electrostatic comb actuators for scanning probe surface imaging. This device, which is micromachined in monocrystalline silicon, nas been actuated and characterized and, for the first time with a such a microtool, an atomic force microscope (AFM) profile has been achieved.text::journal::journal article::research article