Large area fabrication of patterns of resonant waveguide gratings by electron beam lithography for up-scalable applications

Quaranta, GiorgioGuillaume, B.Benes, ZdenekMartin, Olivier J.F.Gallinet, Benjamin2021-05-032021-05-032021-05-032018-08-01https://infoscience.epfl.ch/handle/20.500.14299/177744NanophotonicsPlasmonicsLarge area fabrication of patterns of resonant waveguide gratings by electron beam lithography for up-scalable applicationstext::conference output::conference proceedings::conference paper