Isarakorn, D.Briand, D.Janphuang, P.Sambri, A.Gariglio, G.Triscone, J.-M.Guy, F.Reiner, J. W.Ahn, C. H.de Rooij, N.2011-01-132011-01-132011-01-132010https://infoscience.epfl.ch/handle/20.500.14299/62931Energy harvesting MEMS device based on an epitaxial PZT thin film: fabrication and characterizationtext::conference output::conference proceedings::conference paper