Fernandez-Bolanos Badia, MontserratIonescu, Mihai Adrian2012-02-132012-02-13201010.1109/3DIC.2010.5751423https://infoscience.epfl.ch/handle/20.500.14299/77687heterogeneous integrationthrough silicon viasradio frequencyphotonicenergy harvertinge-BRAINSHeterogeneous Integration for Novel Functionalitytext::conference output::conference proceedings::conference paper