Tyholdt, F.Calame, F.Prume, K.Raeder, H.Muralt, P.2008-04-112008-04-112008-04-11200710.1007/s10832-007-9037-2https://infoscience.epfl.ch/handle/20.500.14299/20479WOS:00025179520001211736Chemically derived seeding layer for {100}-textured PZT thin filmstext::journal::journal article::research article