Tjerkstra, R WEkkels, PKrijnen, GEgger, SBerenschot, EMa, K CBrugger, J2007-03-022007-03-022007-03-022003https://infoscience.epfl.ch/handle/20.500.14299/3390not availableFabrication of an active nanostencil with intergrated microshutterstext::conference output::conference poster not in proceedings