Thomet, Jonathan2024-03-142024-03-142024-03-142023-09-1410.5075/epfl-PV-LAB-309580https://infoscience.epfl.ch/handle/20.500.14299/206126Raw experimental data sorted by toolenInGaN PECVDPV applicationsXRDdatasetf7009272-2424-4fb8-ab29-7626928c7078