Isarakorn, DonLinder, MichaelBriand, Danickde Rooij, Nico2010-06-022010-06-022010-06-02201010.1088/0957-0233/21/7/075801https://infoscience.epfl.ch/handle/20.500.14299/50563WOS:000278794400037In this paper, we introduce a charge integrator as a read-out system for piezoelectric cantilever sensors. The charge integrator is used to monitor the surface charge induced by piezoelectric materials as a function of mechanical stress. This technique improves the response of piezoelectric cantilever sensors in low-frequency measurements, which makes them suitable for chemical and biological detection. Furthermore, it is capable of real-time, portable and all-electrical detection. The detection of alkanethiols on the Au-coated piezoelectric cantilevers is demonstrated to verify the concept.piezoelectric cantilevercharge integratorself-assembled monolayeralkanethiolSelf-Assembled MonolayersFerroelectric Thin-FilmsMicrocantilever SensorsCoefficientMemsFabricationActuatorsCompactD(31)ArrayEvaluation of static measurement in piezoelectric cantilever sensors using a charge integration technique for chemical and biological detectiontext::journal::journal article::research article