Villanueva, G.Plaza, J. A.Sanchez-Amores, A.Bausells, J.Martinez, E.Samitier, J.Errachid, A.2013-08-062013-08-062013-08-06200610.1016/j.msec.2006.01.002https://infoscience.epfl.ch/handle/20.500.14299/93869WOS:000236014400002We have studied the fabrication of high-aspect ratio silicon tips by a combination of deep reactive ion etching and focused ion beam. The reactive ion etching is used to obtain so-called "rocket tips" which can be fabricated with a high aspect ratio. The rocket tips are further processed by using a focused ion beam to obtain nanotips at their apex. Typical results obtained are nanotips with a basis radius of 200 nm and a height of 2.5 mu m, with an apex radius of 5 nm, located on top of a 3 mu m wide and 9 mu m high silicon column. The process would allow however obtaining column heights of several tens of microns. (c) 2006 Elsevier B.V All rights reserved.silicon tipsfibdriescanning force microscopytipstext::journal::journal article::research article