Development of Planar Microcoils for an Electromagnetic Linear Actuator Fabricated in Batch-Type Wafer Technology

Merzaghi, S.Meyer, P.Perriard, Y.2008-11-212008-11-212008-11-212008https://infoscience.epfl.ch/handle/20.500.14299/31581WOS:000263417000081Development of Planar Microcoils for an Electromagnetic Linear Actuator Fabricated in Batch-Type Wafer Technologytext::conference output::conference proceedings::conference paper