Rigante, S.Wipf, M.Bazigos, A.Bedner, K.Bouvet, D.Ionescu, A. M.2014-10-022014-10-022014-10-02201410.1109/MEMSYS.2014.6765828https://infoscience.epfl.ch/handle/20.500.14299/107209WOS:000352217500271In this work, highly scaled FinFETs (Fin Field Effect Transistors) are proposed as both sensing and circuit units of a lab-on-a-chip platform. The FinFET-based sensors with an HfO2 gate oxide demonstrate full pH-response with ΔVth ≈ 56 mV/pH. High readout sensitivity Sout = ΔId/Id ≈ 43% is achieved in combination with excellent device electronic properties, i.e. SS = 77 mV/dec and Ion/Ioff =1.5×10^6. High long-term stability is proven over 4.5 days with a drift in time limited at 0.14 mV/h.MOSFET circuitsbiochemistrybiosensorschemical sensorslab-on-a-chippHFinFETsHafnium compoundsLiquidsLogic gatesNanobioscienceSensitivitySensorstext::conference output::conference proceedings::conference paper