Fabrication of an active nanostencil with intergrated microshutters

Tjerkstra, R WEkkels, PKrijnen, GEgger, SBerenschot, EMa, K CBrugger, J2007-04-132007-04-132007-04-13200310.1109/SENSOR.2003.1217099https://infoscience.epfl.ch/handle/20.500.14299/4637not availableFabrication of an active nanostencil with intergrated microshutterstext::conference output::conference proceedings::conference paper