Noell, W.Clerc, P.-A.Jeanneret, S.Hoogerwerf, A.Niedermann, P.Perret, A.de Rooij, N. F.2009-05-122009-05-122009-05-12200410.1109/MEMS.2004.1290507https://infoscience.epfl.ch/handle/20.500.14299/39641text::conference output::conference proceedings::conference paper