Improvements in diffraction efficiency of gratings and microlenses with continuous relief structures

Kuittinen, M.Herzig, H. P.Ehbets, P.2009-04-222009-04-222009-04-22199510.1016/0030-4018(95)00510-Fhttps://infoscience.epfl.ch/handle/20.500.14299/37664Improvements in diffraction efficiency of gratings and microlenses with continuous relief structurestext::journal::journal article::research article