Weis, S.Riviere, R.Deleglise, S.Verhagen, E.Gavartin, E.Arcizet, O.Schliesser, A.Kippenberg, T. J.2012-06-252012-06-252012-06-25201110.1364/QELS.2011.QFH6https://infoscience.epfl.ch/handle/20.500.14299/82298WOS:000295612403293Using optical sideband cooling, a micromechanical oscillator is cooled to a phonon occupancy below 10 phonons, corresponding to a probability of finding it in its quantum ground state more than 10% of the time.enResonatorCooling of a Micromechanical Oscillator into the Quantum Regimetext::conference output::conference proceedings::conference paper