Vertical Mirrors Fabricated by Deep Reactive Ion Etching for Fiber-Optic Switching Applications

Marxer, C.Thio, Ch.Grétillat, M.-A.de Rooij, N. F.Anthamatten, O.Bättig, R.Valk, B.Vogel, P.2009-05-122009-05-122009-05-12199710.1109/84.623118https://infoscience.epfl.ch/handle/20.500.14299/39591Vertical Mirrors Fabricated by Deep Reactive Ion Etching for Fiber-Optic Switching Applicationstext::journal::journal article::research article