Völkel, R.Herzig, H. P.Nussbaum, Ph.Blattner, P.Dändliker, R.Cullmann, E.Hugle, W.B.2009-04-222009-04-222009-04-221997https://infoscience.epfl.ch/handle/20.500.14299/37713New lithographic techniques using microlens arraystext::conference output::conference proceedings::conference paper