Wafer-Scale Processing of Ultra-Low-Loss Gallium Phosphide Integrated Photonics

Nardi, AlbertoHernandez, Javier NayaIndolese, David I.Möhl, CharlesCaimi, DanieleSousa, MarylineKuznetsov, NikolaiKippenberg, Tobias J.Seidler, Paul2025-01-262025-01-262025-01-25202410.1364/cleo_si.2024.stu4e.42-s2.0-85215314505https://infoscience.epfl.ch/handle/20.500.14299/245261We demonstrate wafer-scale processing of integrated photonic circuits made of gallium phosphide, with propagation losses in waveguides as low as 0.40 dB/cm, and establish new record-high quality factors with resonators on this material platform.falseCircuitsElectro-optical waveguidesGalliumPhotonicsPropagation lossesQ-factorResonatorsWaveguide lasersWafer-Scale Processing of Ultra-Low-Loss Gallium Phosphide Integrated Photonicstext::conference output::conference proceedings::conference paper