Courbat, J.Briand, D.de Rooij, N. F.2009-05-122009-05-122009-05-12200710.1016/j.sna.2007.04.006https://infoscience.epfl.ch/handle/20.500.14299/39164Reliability improvement of suspended platinum-based micro-heating elementstext::journal::journal article::research article