Lichtenberg, JanBausells, JoanBaron, AlexisCrowley, MelanieMcDonnell, LiamO’Farrell, ConnorGil, A.Li, Y.Gracia-Lostao, A.Perez-Murano, F.Sheehan, A.Song, W. H.Vancura, C.Volden, T.Villanueva, G.Zimmermann, M.2013-08-062013-08-062013-08-062004https://infoscience.epfl.ch/handle/20.500.14299/93819CMOS-integrated, cantilever-based sensor devices: the Biofinger projecttext::conference output::conference proceedings::conference paper