Quack, NielsToros, AdrienKiss, MarcellGraziosi, TeodoroGallo, Pascal2019-12-052019-12-052019-12-052019https://infoscience.epfl.ch/handle/20.500.14299/163769The present invention relates to a free-standing single crystalline diamond part and a single crystalline diamond part production method. The method includes the steps of: - providing a single crystalline diamond substrate or layer; - providing a first adhesion layer on the substrate or layer; - providing a second adhesion layer on the first adhesion layer: - providing a mask layer on the second adhesion layer; - forming at least one indentation or a plurality of indentations through the mask layer and the first and second adhesion layers to expose a portion or portions of the single crystalline diamond substrate or layer; and - etching the exposed portion or portions of the single crystalline diamond substrate or layer and etching entirely through the single crystalline diamond substrate or layer.patentUS11512409JP7130272JP2021500287CN111417747EP3676426US2020199780WO201904343260081103