Canonica, MichaelZamkotsian, FredericLanzoni, PatrickNoell, Wilfried2013-02-272013-02-272013-02-27201210.1109/OMEMS.2012.6318829https://infoscience.epfl.ch/handle/20.500.14299/89899WOS:000309942400054MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated and tested, exhibiting very good surface flatness, high contrast and cryogenic operation ability.MOEMSMEMSmicromirrorlarge arraymulti-object spectroscopycryogenic applicationprogrammable slit maskLarge micromirror array designed and tested for Multi-Object Spectroscopytext::conference output::conference proceedings::conference paper