Küçük, Seniz EsraVillanueva, GuillermoCalamandrei, Hugo2022-04-252022-04-252022-04-252021-07-01https://infoscience.epfl.ch/handle/20.500.14299/187417Nowadays almost all the mobile networks use the 4G and will eventually soon use the 5G. To use this technology, devices need lots of band filters. This is why the Advanced NEMS laboratory of the EPFL is developing a new kind of MEMS resonant device at 5GHz called "Lithium niobate bulk acoustic resonator". The goal of this project is to compare several techniques to create thin walls by several deposition methods into silicon layer in order to allow chain production of those resonators.student work::semester or other student projects