Ultralow Dissipation Mechanical Resonators for Quantum Optomechanics

Engelsen, Nils J.Fedorov, Sergey A.Ghadimi, Amir H.Bereyhi, Mohammad J.Beccari, AlbertoSchilling, RyanWilson, Dalziel J.Kippenberg, Tobias J.2019-09-112019-09-112019-09-112019-01-0110.1364/CLEO_QELS.2019.FM1A.1https://infoscience.epfl.ch/handle/20.500.14299/161043WOS:000482226302395We demonstrate dissipation dilution engineering techniques for ultralow dissipation mechanical resonators. The Si3N4 nanobeams show quality factors (Q) as high as 800 million and Q x f exceeding 10(15) Hz-both records at room temperature. (C) 2019 The Author(s)Engineering, Electrical & ElectronicOpticsPhysics, AppliedEngineeringOpticsPhysicsUltralow Dissipation Mechanical Resonators for Quantum Optomechanicstext::conference output::conference proceedings::conference paper