Bereyhi, Mohammad J.Arabmoheghi, AmiraliEngelsen, Nils J.Kippenberg, Tobias J.2022-09-122022-09-122022-09-122021-01-0110.1364/CLEO_QELS.2021.FTh2P.6https://infoscience.epfl.ch/handle/20.500.14299/190612WOS:000831479801272We report the design fabrication and characterization of a monolithic nano-optomechanical transducer comprised of high stress silicon nitride (Si3N4). Our system features a one dimensional Fabry-Perot photonic crystal cavity (Q approximate to 10(5)) integrated with a high-Q (Q approximate to 10(6)) nanobeam resonator with optomechanical cooperativity of C-0 = 23. (c) 2021TheAuthor(s)Engineering, Electrical & ElectronicOpticsPhysics, AppliedEngineeringPhysicsA high-cooperativity, nano-optomechanical system comprised of high stress Si3N4text::conference output::conference proceedings::conference paper