Characterization and Modelling of Silicon Piezoresistive Accelerometers Fabricated by a Bipolar-Compatible Process

Tschan, T.de Rooij, N. F.Bezinge, A.Ansermet, S.Berthoud, J.2009-05-122009-05-122009-05-12199110.1016/0924-4247(91)87058-Bhttps://infoscience.epfl.ch/handle/20.500.14299/39959Characterization and Modelling of Silicon Piezoresistive Accelerometers Fabricated by a Bipolar-Compatible Processtext::journal::journal article::research article