Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the art and catalog of recipes

Toros, AdrienKiss, Marcell KristofGraziosi, TeodoroMi, SichenBerrazouane, R.Naamoun, M.Vukajlovic Plestina, J.Gallo, P.Quack, Niels2020-08-242020-08-242020-08-242020-04-0510.1016/j.diamond.2020.107839https://infoscience.epfl.ch/handle/20.500.14299/171070Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the art and catalog of recipestext::journal::journal article::research article