Thomet, Jonathan2024-03-142024-03-142024-03-142023-09-1410.5075/epfl-PV-LAB-309579https://infoscience.epfl.ch/handle/20.500.14299/206124Raw experimental data sorted by toolenInGaN PECVDPV applicationsdatasetfe78bb5b-a74e-45a8-a3d5-f55438ead400