Bazigos, AntoniosAyala, Christopher L.Rana, SunilGrogg, DanielFernandez-Bolaños, MontserratHagleitner, ChristophQin, TianPamunuwa, DineshIonescu, Adrian M.2014-09-192014-09-192014-09-19201410.1016/j.sse.2014.06.030https://infoscience.epfl.ch/handle/20.500.14299/106997WOS:000340220500017The nanoscaled electrostatically actuated electromechanical ohmic switch is an emerging device with advanced performance in terms of ION/IOFF ratio. It is imperative that compact models accompany such novel devices in order to fully evaluate their potential at the circuit-level. A minimal, yet, adequate compact model is developed and analyzed in this work. Further, the model is used as a compass for switch design space exploration and, simultaneously, a corresponding parameter extraction methodology is compiled. The application on data from numerical simulations and on measurements of fabricated devices, verifies the potential of the model, while circuit-level simulations validate its robustness within an industrial IC design environment.FP7NEMIACNEMSMEMScompact modellingelectrostatic actuationohmic switchParameter extraction methodologytext::journal::journal article::research article