Grétillat, M.-A.Linder, C.de Rooij, N. F.2009-05-122009-05-122009-05-12199410.1016/0924-4247(93)00710-Lhttps://infoscience.epfl.ch/handle/20.500.14299/39315Integrated Shielding lines on Multilayer Polysilicon Resonatorstext::journal::journal article::research article