Digital Holographic Microscopy (DHM) applied to optical metrology: A resolution enhanced imaging technology applied to inspection of microscopic devices with subwavelength resolution

Depeursinge, C. D.Marian, A. M.Montfort, F.Colomb, T.Charriere, F.Kuhn, J.2009-07-202009-07-202009-07-20200610.1007/3-540-29303-5_41https://infoscience.epfl.ch/handle/20.500.14299/41613WOS:000233295500041[MVD]CONTRASTDigital Holographic Microscopy (DHM) applied to optical metrology: A resolution enhanced imaging technology applied to inspection of microscopic devices with subwavelength resolutiontext::conference output::conference proceedings::conference paper