Howling, A. A.Sansonnens, L.Ballutaud, J.Grangeon, F.Delachaux, T.Hollenstein, Ch.Daudrix, V.Kroll, U.2009-02-102009-02-102009-02-102000https://infoscience.epfl.ch/handle/20.500.14299/35003The Influence of Plasma Chemistry on the Deposition of Microcrystalline Silicon for Large Area Photovoltaic Solar Cellstext::conference output::conference proceedings::conference paper