Briand, D.Guenat, O.van der Schoot, B.Hirata, T.de Rooij, N. F.2009-05-122009-05-122009-05-122000https://infoscience.epfl.ch/handle/20.500.14299/39068Micro-hotplate, a useful concept for gas sensing, fluidics and space applicationstext::conference output::conference proceedings::conference paper