ABH damping of monolithic silica glass cantilever by structural and material modification using fs laser micromachining

Tomita, KanaKishi, TetsuoYano, TetsujiVlugter, PieterBellouard, Yves2021-01-092021-01-092020-09-2710.1111/ijag.15857https://infoscience.epfl.ch/handle/20.500.14299/174562ABH damping of monolithic silica glass cantilever by structural and material modification using fs laser micromachiningtext::journal::journal article::research article