Local Oxidation of Titanium Using a Dynamic Mode Operated Tuning Fork Probe with Microfabricated Silicon Cantilever

Suter, K.Akiyama, T.de Rooij, N. F.Staufer, U.2009-05-122009-05-122009-05-122005https://infoscience.epfl.ch/handle/20.500.14299/39928Local Oxidation of Titanium Using a Dynamic Mode Operated Tuning Fork Probe with Microfabricated Silicon Cantilevertext::conference output::conference proceedings::conference paper