Gersbach, M.Maruyama, Y.Labonne, E.Richardson, J.Walker, R.Grant, L.Henderson, R. K.Borghetti, F.Stoppa, D.Charbon, E.2009-07-132009-07-132009-07-13200910.1109/ESSCIRC.2009.5326021https://infoscience.epfl.ch/handle/20.500.14299/41284WOS:000276195800041TdcTDC arrayTcspcSpadFlimResolutionDetectorSensorA Parallel 32x32 Time-to-Digital Converter Array Fabricated in a 130nm Imaging CMOS Technologytext::conference output::conference proceedings::conference paper