Chauvy, P.-F.Landolt, D.Hoffmann, P.2009-07-202009-07-202009-07-202002https://infoscience.epfl.ch/handle/20.500.14299/41727WOS:0001818712000273583[NRG]Applications of Laser lithography on oxide film to titanium micro-machiningtext::conference output::conference proceedings::conference paper