Yan, Y.Rey-Mermet, S.He, Z.B.Deng, G.Muralt, P2010-02-222010-02-222010-02-22200910.1016/j.proche.2009.07.301https://infoscience.epfl.ch/handle/20.500.14299/47608WOS:000275995600082Solid oxide electrolyte membranes of sputter deposited yttria-stablized zirconia (YSZ) were integrated in silicon technology for applications in micro power generators fuelled by hydrogen or H2+CO. An electrochemically deposited nickel grid was used as mechanical support for the 200-300 nm thick membrane. Cells with 0.5 to 5 mm diameter were fabricated showing mechanical stability up to 650 °C. The ionic conduction becomes sufficient to produce open circuit voltage (OCV) above 380 °C. An OCV of 850 mV was achieved at 550 °C in an H2/Ar fuel mixture using porous Pt electrodes.Micro solid oxide fuel cellyttria-stabilized zirconiasilicon micromachiningtext::conference output::conference proceedings::conference paper