Fernandez-Bolanos, MontserratMuller, AndreiWeber, JosefRamm, Peter2019-06-182019-06-182019-06-182018-01-0110.1109/DTIP.2018.8394203https://infoscience.epfl.ch/handle/20.500.14299/157037WOS:000468341300023A few application demonstrators of heterogeneous 3D integrated systems including innovative nanosensors for gas detection and biofludic applications have been successfully implemented showing efficient low-temperature heterogeneous integration processes, miniaturization, low power consumption, extremely low detection limits (5 ppm) and novel functionalities very interesting for smart sensors in automotive and healthcare applications.Engineering, Electrical & ElectronicEngineering, MechanicalEngineeringlow-temperature bondingthrough silicon vias (is v)solid-liquid interdiffusion (slid)fet-based sensorscnt-based gas sensorheterogeneous 3d integration<bold></bold>Advanced Sensor Systems by Low-Temperature Heterogeneous 3D Integration Processestext::conference output::conference proceedings::conference paper