Villanueva, G.Vazquez-Mena, O.van den Boogaart, M. A. F.Sidler, K.Savu, V.Brugger, J.2007-11-072007-11-072007-11-07200810.1016/j.mee.2007.12.068https://infoscience.epfl.ch/handle/20.500.14299/14459Etching of sub-micrometer structures through Stenciltext::conference output::conference proceedings::conference paper